TECHNOLOGY INNOVATION

ARA5000s
数字式质量流量计

ARA5000s
FEATURES
-数字型MFM。
-金属密封及电抛光表面处理。
-高精度:适用于精密测量。
-实时测量和流量积累。
-数字通信:Device NET, RS-485, Analog。
SPECIFICATIONS
model ARA5000 / 5001 / 5002 / 5010 / 5011 / 5012 / 5020 / 5021 / 5022 / 5030 / 5031 / 5032
flow range (N2 Equivalent) 5 sccm ~ 200 slm
Flow Rate Control Range 全量程的2% ~ 100%
Accuracy ≤全量程± 0.5%
Response Time ≤ 1.0 秒
Linearity ≤全量程± 0.2%
Repeatability ≤全量程± 0.15%
Normal Operating Pressure 50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 200 slm)
Maximum Operating Pressure 300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 200 slm)
Valve Shut Down <全量程 0.01% (5 sccm ~ 30 slm), <全量程 0.1% (30 slm ~ 200 slm),
Zero Stability 每年全量程≤± 0.5%
Temperature Coefficient 每°C全量程 0.01%
Leak Integrity ≤ 5 x 10-¹² Pa.m³/sec (He)
Control Valve type
Seal type 金属焊封材料
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net
Power Supply +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC
Operation Temperature 5 ~50 °C (推荐温度范围 : 15~35 °C)
Warm-up Time 30 分钟 (保证精度 : 60 分钟)
Material STS-316L 电抛光 / 光亮退火 (<0.1㎛ Ra)
Pressure Insensitivity
Display type 顶部安装集成4位 FND , LCD
DIMENSIONS