제품소개
Product Overview
Product Overview
Mass Flow Total Solution
Gas Control
Thermal Type MFC
MARU 3000
MARU 5000
MARU 7000
Pressure Type MFC
MARU 9000
Liquid Control
Liquid Flow Controller
ARI 7000 LMFC
ARI 7000 LMFM
High-Temp. Controller
MARU 8000HT Thermal Type
MARU 8100HT PS Type
Special Gas Control
Pressure Controller(Backside He)
BARON 3000
Pressure Controller(Transfer Module)
BARON 3100
Flow Ratio Controller
MADEE 5000 (일체형)
MADEE 5100 (분리형)
Gas box
Conventional Type
IGS Panel Type
