TECHNOLOGY INNOVATION

MARU9000 series (PS-MFC)
Pressure based Mass Flow Controller

MARU9000 series (PS-MFC)
MARU9000 Series feature excellent linearity and accurate within ±0.5% of set point, which employ actual gas and rate - of- change verification method, front-end pressure and temperature compensation algorithm
FEATURES
- Digital Type MFC & Top Mount Integrated LCD
- Electro polishing surface treatment
- Pressure based function
- Fast response time and high accuracy
- Digital Communications : EtherCAT, Device NET, RS-485, Analog
SPECIFICATIONS
model MARU9000 / 9001 / 9002 / 9010 / 9011 / 9012
flow range (N2 Equivalent) 5 sccm ~ 20 slm
Flow Rate Control Range 0.5 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Reading Scale (10~100%), ≤± 0.1% of Full Scale (0.5~10%)
Response Time ≤ 0.5 second
Linearity ≤± 0.5% of Full Scale
Repeatability ≤± 0.25% of Full Scale
Normal Operating Pressure 100~350 kPa (14.5 ~ 45 psig), 100~550 kPa (14.5 ~ 80 psig)
Maximum Operating Pressure 600 kPa
Valve Shut Down < 0.01% of Full Scale
Zero Stability
Temperature Coefficient ±1 °C (15 ~ 50 °C)
Leak Integrity ≤ 5 x 10-¹² Pa.m³/sec (He)
Control Valve type Normally Closed Solenoid
Seal type Metal Seal
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT
Power Supply +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 30 min (Accuracy Guaranteed : 60 min)
Material STS-316L Electro-polished / Bright annealing (<0.1㎛ Ra)
Pressure Insensitivity ≤± 2% of F.S up/down to 5psi/sec
Display type Top mount integrated LCD
DIMENSIONS