TECHNOLOGY INNOVATION

MARU700 series (PI-MFC)
Pressure Insensitive Mass Flow Controller

MARU700 series (PI-MFC)
FEATURES
- Pressure insensitive function
- High stability,accuracy and repeatability
- Fast response time
- various application areas
- Digital Communications : EtherCAT, Device NET, RS-485, Analog
SPECIFICATIONS
model MARU700 / 701 / 702 / 710 / 711 /712 / 720 / 721 / 722 / 730 / 731 / 732
flow range (N2 Equivalent) 5 sccm ~ 200 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Reading Scale (35~100%), ≤± 0.35% of Full Scale (5~35%)
Response Time ≤ 1.0 second
Linearity ≤± 0.2% of Full Scale
Repeatability ≤± 0.2% of Full Scale
Normal Operating Pressure 50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 200 slm)
Maximum Operating Pressure 300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 200 slm)
Valve Shut Down < 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 200 slm),
Zero Stability ≤± 0.5% Full Scale per year
Temperature Coefficient 0.01% Full Scale per °C
Leak Integrity ≤ 1 x 10-10 Pa.m³/sec (He)
Control Valve type Normally Closed Solenoid
Seal type PTFE
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT
Power Supply +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 30 min (Accuracy Guaranteed : 60 min)
Material STS-316L
Pressure Insensitivity ≤± 2% of F.S up/down to 5psi/sec
Display type Top mount integrated 4 digit FND , LCD
DIMENSIONS