TECHNOLOGY INNOVATION

TSC-200 series
Analog Mass Flow Controller

TSC-200 series
FEATURES
SPECIFICATIONS
model TSC-210 / 220 / 230 / 245
flow range (N2 Equivalent) 0.007 sccm ~ 400 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Full Scale (0.007~100slm), ≤± 2.0% of Full Scale (100~400slm),
Response Time ≤ 2.0 sec (0.007~100 slm), ≤ 3.5 (100 ~ 400 slm)
Linearity ≤± 0.2% of Full Scale
Repeatability ≤± 0.2% of Full Scale
Normal Operating Pressure
Maximum Operating Pressure
Valve Shut Down
Zero Stability
Temperature Coefficient
Leak Integrity
Control Valve type Normally Closed/Open Solenoid
Seal type Elastomer (Viton, Viton-ETP, Kalres, PTFE, etc.)
Digital Interface Analog 0~5 VDC or 4~20mA
Power Supply +15~24 VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 15 min (Accuracy Guaranteed : 30 min)
Material
Pressure Insensitivity
Display type
DIMENSIONS