TECHNOLOGY INNOVATION
PRODUCTS
MFC
TSC-200 series
Analog Mass Flow Controller
SPECIFICATIONS
| model | TSC-210 / 220 / 230 / 245 |
|---|---|
| flow range (N2 Equivalent) | 0.007 sccm ~ 400 slm |
| Flow Rate Control Range | 2 ~ 100% of Full Scale |
| Accuracy | ≤± 1.0% of Full Scale (0.007~100slm), ≤± 2.0% of Full Scale (100~400slm), |
| Response Time | ≤ 2.0 sec (0.007~100 slm), ≤ 3.5 (100 ~ 400 slm) |
| Linearity | ≤± 0.2% of Full Scale |
| Repeatability | ≤± 0.2% of Full Scale |
| Normal Operating Pressure | |
| Maximum Operating Pressure | |
| Valve Shut Down | |
| Zero Stability | |
| Temperature Coefficient | |
| Leak Integrity | |
| Control Valve type | Normally Closed/Open Solenoid |
| Seal type | Elastomer (Viton, Viton-ETP, Kalres, PTFE, etc.) |
| Digital Interface | Analog 0~5 VDC or 4~20mA |
| Power Supply | +15~24 VDC |
| Operation Temperature | 5 ~50 °C (Recommended temperature range : 15~35 °C) |
| Warm-up Time | 15 min (Accuracy Guaranteed : 30 min) |
| Material | |
| Pressure Insensitivity | |
| Display type |
DIMENSIONS
