model |
TSC-210 / 220 / 230 / 245 |
flow range (N2 Equivalent) |
0.007 sccm ~ 400 slm |
Flow Rate Control Range |
2 ~ 100% of Full Scale |
Accuracy |
≤± 1.0% of Full Scale (0.007~100slm), ≤± 2.0% of Full Scale (100~400slm), |
Response Time |
≤ 2.0 sec (0.007~100 slm), ≤ 3.5 (100 ~ 400 slm) |
Linearity |
≤± 0.2% of Full Scale |
Repeatability |
≤± 0.2% of Full Scale |
Normal Operating Pressure |
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Maximum Operating Pressure |
|
Valve Shut Down |
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Zero Stability |
|
Temperature Coefficient |
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Leak Integrity |
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Control Valve type |
Normally Closed/Open Solenoid |
Seal type |
Elastomer (Viton, Viton-ETP, Kalres, PTFE, etc.) |
Digital Interface |
Analog 0~5 VDC or 4~20mA |
Power Supply |
+15~24 VDC |
Operation Temperature |
5 ~50 °C (Recommended temperature range : 15~35 °C) |
Warm-up Time |
15 min (Accuracy Guaranteed : 30 min) |
Material |
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Pressure Insensitivity |
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Display type |
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