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MARU7000 series (PI-MFC)
Pressure Insensitive Mass Flow Controller

MARU7000 series (PI-MFC)
MARU7000PI is MKP's representative MFC for semiconductor manufacturing process like CVD, Diffusion, Etch, Metal Interconnect and etc.
It is a pressure insensitive, digital and thermal typed MFC and registered as Samsung Electronics and SK hynix Common Spec.
FEATURES
- Digital Type MFC & Top Mount Integrated 4-Digit FND, LCD
- Electro polishing surface treatment
- Pressure insensitive function
- Fast response time and high accuracy
- Digital Communications : EtherCAT, Device NET, RS-485, Analog
SPECIFICATIONS
model MARU7000 / 7001 / 7002 / 7010 / 7011 / 7012
flow range (N2 Equivalent) 5 sccm ~ 50 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Reading Scale (25~100%), ≤± 0.25% of Full Scale (5~25%)
Response Time ≤ 1.0 second
Linearity ≤± 0.2% of Full Scale
Repeatability ≤± 0.15% of FUll Scale
Normal Operating Pressure 50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 50 slm)
Maximum Operating Pressure 300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 50 slm)
Valve Shut Down < 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 50 slm),
Zero Stability ≤± 0.5% Full Scale per year
Temperature Coefficient 0.01% Full Scale per °C
Leak Integrity ≤ 5 x 10-¹² Pa.m³/sec (He)
Control Valve type Normally Closed Solenoid
Seal type Metal Seal
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT
Power Supply +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 30 min (Accuracy Guaranteed : 60 min)
Material STS-316L Electro-polished / Bright annealing (<0.1㎛ Ra)
Pressure Insensitivity ≤± 2% of F.S up/down to 5psi/sec
Display type Top mount integrated 4 digit FND , LCD
DIMENSIONS