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MARU7000 series (Pressure Insensitive MFC)
Pressure Insensitive Mass Flow Controller

MARU7000 series (Pressure Insensitive MFC)
MARU7000PI is MKP's representative MFC for semiconductor manufacturing process like CVD, Diffusion, Etch, Metal Interconnect and etc.
It is a pressure insensitive, digital and thermal typed MFC and registered as Samsung Electronics and SK hynix Common Spec.
FEATURES
  • Pressure Insensitive Mass Flow Controller (PI MFC)
  • Fast response time (≤1sec).
  • Stability are better than MARU5000 series by PI function.
  • Strong corrosion resistance by electro polishing surface treatment.
  • Digital Communications: Device NET, RS-485, Analog.
SPECIFICATIONS
model MARU7000 / 7001 / 7002 / 7010 / 7011 / 7012
flow range (N2 Equivalent) 5 sccm ~ 50 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Reading Scale (25~100%), ≤± 0.25% of Full Scale (5~25%)
Response Time ≤ 1.0 second
Linearity ≤± 0.2% of Full Scale
Repeatability ≤± 0.15% of FUll Scale
Normal Operating Pressure 50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 50 slm)
Maximum Operating Pressure 300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 50 slm)
Valve Shut Down < 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 50 slm),
Zero Stability ≤± 0.5% Full Scale per year
Temperature Coefficient 0.01% Full Scale per °C
Leak Integrity ≤ 5 x 10-¹² Pa.m³/sec (He)
Control Valve type Normally Closed Solenoid
Seal type Metal Seal
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net
Power Supply +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 30 min (Accuracy Guaranteed : 60 min)
Material STS-316L Electro-polished / Bright annealing (<0.1㎛ Ra)
Pressure Insensitivity ≤± 2% of F.S up/down to 5psi/sec
Display type Top mount integrated 4 digit FND , LCD
DIMENSIONS