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MARU7000PI
Pressure Insensitive Mass Flow Controller

MARU7000PI
MARU7000PI is MKP's representative MFC for semiconductor manufacturing process like CVD, Diffusion, Etch, Metal Interconnect and etc.
It is a pressure insensitive, digital and thermal typed MFC and registered as Samsung Electronics and SK hynix Common Spec.
FEATURES
Pressure insensitive function
Electro polishing surface treatment
Fast response time and high accuracy
SPECIFICATIONS
model MARU7000PI
flow range (N2 Equivalent) 5 sccm ~ 30 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy < +/- 1.0% of Reading Scale (35~100%), < +/- 0.35% of Full Scale (5~35%)
Response Time < 1.0 second
Linearity < +/- 0.2% of Full Scale
Repeatability < 0.15% of FUll Scale
Normal Operating Pressure 50~300 kPa
Maximum Operating Pressure 450 kPa
Valve Shut Down < 1% of Full Scale
Zero Stability < +/- 0.5% Full Scale per year
Temperature Coefficient 0.01% Full Scale per °C
Leak Integrity 1 x 10-11 Pa.m3/sec (He)
Control Valve type Normally Closed Solenoid
Seal type Metal Seal
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT
Power Supply +15~24 VDC
Operation Temperature 10 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 30 min (Accuracy Guaranteed : 60 min)
Material STS-316L Electro-polished / Bright annealing
Pressure Insensitivity +/- 2 psid over 0.1 sec.
Display type Top mount integrated 4 digit FND
DIMENSIONS