TECHNOLOGY INNOVATION

TSC-M200 series
Analog Mass Flow Controller

TSC-M200 series
FEATURES
SPECIFICATIONS
model TSC-M245 / 250 / 255
flow range (N2 Equivalent) 0 sccm ~ 1,500 slm
Flow Rate Control Range 2 ~ 100% of Full Scale (M245), 5 ~ 100% of Full Scale (M250 , 255)
Accuracy ≤± 2.0% of Full Scale (M245), ≤± 3.0% of Full Scale (M250 , 255)
Response Time ≤ 3.0 second (M245), ≤ 4.0 second (M250, 255)
Linearity ≤± 0.5% of Full Scale (M245), ≤± 1.5% of Full Scale (M250, 255),
Repeatability ≤± 0.3% of Full Scale (M245), ≤± 1.0% of Full Scale (M250, 255),
Normal Operating Pressure
Maximum Operating Pressure
Valve Shut Down
Zero Stability
Temperature Coefficient
Leak Integrity
Control Valve type Normally Closed/Open Solenoid
Seal type Elastomer (Viton, Viton-ETP, Kalres, PTFE, etc.)
Digital Interface Analog 0~5 VDC or 4~20mA
Power Supply +15~24 VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 15 min (Accuracy Guaranteed : 30 min)
Material
Pressure Insensitivity
Display type
DIMENSIONS