TECHNOLOGY INNOVATION

TSM-D200 series
Digital Mass Flow Meter

TSM-D200 series
FEATURES
SPECIFICATIONS
model TSM-D210 / 220 / 230 / 240 / 245 / 250
flow range (N2 Equivalent) 5 sccm ~ 2,000 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Full Scale (5sccm~100slm), ≤± 2.0% of Full Scale (100~2,000slm),
Response Time ≤ 1.0 second
Linearity ≤± 0.2% of Full Scale
Repeatability ≤± 0.2% of Full Scale
Normal Operating Pressure
Maximum Operating Pressure
Valve Shut Down
Zero Stability
Temperature Coefficient
Leak Integrity
Control Valve type
Seal type Elastomer (Viton, Viton-ETP, Kalres, PTFE, etc.)
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT
Power Supply +15~24 VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 15 min (Accuracy Guaranteed : 30 min)
Material
Pressure Insensitivity
Display type
DIMENSIONS