TECHNOLOGY INNOVATION

TSM-L100 series
Analog Mass Flow Meter

TSM-L100 series
FEATURES
SPECIFICATIONS
model TSM-L120 / 130 / 140
flow range (N2 Equivalent) 0 sccm ~ 400 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy ≤± 5.0% of Full Scale
Response Time ≤ 2.0 second
Linearity ≤± 0.5% of Full Scale
Repeatability ≤± 0.5% of Full Scale
Normal Operating Pressure
Maximum Operating Pressure
Valve Shut Down
Zero Stability
Temperature Coefficient
Leak Integrity
Control Valve type
Seal type Elastomer (Viton, Viton-ETP, Kalres, PTFE, etc.)
Digital Interface Analog 0~5 VDC or 4~20mA
Power Supply +15~24 VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 15 min (Accuracy Guaranteed : 30 min)
Material
Pressure Insensitivity
Display type
DIMENSIONS