TECHNOLOGY INNOVATION

MARU3000 series (Economical MFC)
Digital Mass Flow Controller

MARU3000 series (Economical MFC)
MARU3000 series is an entry model for the MKP, but its performance is super-normal. MKP tried hard to lower costs while maintaining performance for customer satisfaction, and the product is MARU3000 series.
Performance, such as the accuracy and response speed that MFC should have, is equivalent to the higher model. Equivalent to the higher-end MARU5000 series, it offers reasonable prices, and it is a supernormal with the factors that make it a bestseller.
 
FEATURES
  • Entry Mass Flow Controller.
  • This series has good performance compared to price.
  • Strong corrosion resistance by bright annealing.
  • Digital Communications: Device NET, RS-485, Analog.
SPECIFICATIONS
model MARU3000 / 3001 / 3002 / 3010 / 3011 / 3012 / 3020 / 3021 / 3022 / 3030 / 3031 / 3032
flow range (N2 Equivalent) 5 sccm ~ 200 slm
Flow Rate Control Range 5 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Reading Scale (35~100%), ≤± 0.25% of Full Scale (5~35%)
Response Time < 1.0 second
Linearity ≤± 0.2% of Full Scale
Repeatability ≤± 0.15% of FUll Scale
Normal Operating Pressure 50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 200 slm)
Maximum Operating Pressure 300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 200 slm)
Valve Shut Down < 1% of Full Scale
Zero Stability ≤± 0.5% Full Scale per year
Temperature Coefficient 0.01% Full Scale per °C
Leak Integrity ≤ 5 x 10-¹² Pa.m³/sec (He)
Control Valve type Normally Closed Solenoid
Seal type PTFE
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net
Power Supply +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 30 min (Accuracy Guaranteed : 60 min)
Material STS-316L Bright annealing
Pressure Insensitivity
Display type Top mount integrated LCD (EtherCAT)
DIMENSIONS