TECHNOLOGY INNOVATION

MARU5000
Digital Mass Flow Controller

MARU5000
MARU5000 is Korea's first MFC for semiconductor manufacturing process.
Digital and thermal typed MFC and registered as Samsung Electronics Common Spec.
 
FEATURES
Electro polishing surface treatment
Fast response time and high accuracy
SPECIFICATIONS
model MARU5000
flow range (N2 Equivalent) 5 sccm ~ 200 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy < +/- 1.0% of Reading Scale (35~100%), < +/- 0.35% of Full Scale (5~35%)
Response Time < 1.0 second
Linearity < +/- 0.2% of Full Scale
Repeatability < 0.15% of FUll Scale
Normal Operating Pressure 50~300 kPa
Maximum Operating Pressure 450 kPa
Valve Shut Down < 1% of Full Scale
Zero Stability < +/- 0.5% Full Scale per Year
Temperature Coefficient 0.01% Full Scale per °C
Leak Integrity 1 x 10-11 Pa.m3/sec (He)
Control Valve type Normally Closed Solenoid
Seal type Metal Seal
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net
Power Supply +15~24 VDC
Operation Temperature 10 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 30 min (Accuracy Guaranteed : 60 min)
Material STS-316L Electro-polished / Bright annealing
Pressure Insensitivity
Display type
DIMENSIONS