TECHNOLOGY INNOVATION

MARU5000 series
Digital Mass Flow Controller

MARU5000 series
MARU5000 is Korea's first MFC for semiconductor manufacturing process.
Digital and thermal typed MFC and registered as Samsung Electronics Common Spec.
 
FEATURES
- Digital Type MFC & Top Mount Integrated LCD (EtherCAT)
- Electro polishing surface treatment
- Fast response time and high accuracy
- Digital Communications : EtherCAT, Device NET, RS-485, Analog
SPECIFICATIONS
model MARU5000 / 5001 / 5002 / 5010 / 5011 / 5012 / 5020 / 5021 / 5022 / 5030 / 5031 / 5032
flow range (N2 Equivalent) 5 sccm ~ 200 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Reading Scale (25~100%), ≤± 0.25% of Full Scale (5~25%)
Response Time < 1.0 second
Linearity ≤± 0.2% of Full Scale
Repeatability ≤± 0.15% of FUll Scale
Normal Operating Pressure 50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 200 slm)
Maximum Operating Pressure 300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 200 slm)
Valve Shut Down < 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 200 slm),
Zero Stability ≤± 0.5% Full Scale per year
Temperature Coefficient 0.01% Full Scale per °C
Leak Integrity ≤ 5 x 10-¹² Pa.m³/sec (He)
Control Valve type Normally Closed Solenoid
Seal type Metal Seal
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT
Power Supply +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 30 min (Accuracy Guaranteed : 60 min)
Material STS-316L Electro-polished / Bright annealing
Pressure Insensitivity
Display type Top mount integrated LCD (EtherCAT)
DIMENSIONS