TECHNOLOGY INNOVATION

TSC-D230
Digital Mass Flow Controller

TSC-D230
TSC-D230 is digital and thermal MFC which developed for more general equipments lilke a load port, furnace, scrubber, and etc.
FEATURES
Fast response time and high accuracy
SPECIFICATIONS
model TSC-D230
flow range (N2 Equivalent) 30 ~ 100 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy < +/- 1.0% of Full Scale
Response Time < 1.5 second (10 ~ 100%), < 2 second (2 ~ 10%)
Linearity < +/- 0.2% of Full Scale
Repeatability < 0.2% of FUll Scale
Normal Operating Pressure
Maximum Operating Pressure
Valve Shut Down
Zero Stability
Temperature Coefficient
Leak Integrity
Control Valve type Normally Closed Solenoid
Seal type Elastomer (Viton, Viton-ETP, Kalres, etc.)
Digital Interface RS-485
Power Supply +15~24 VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 15min (Accuracy Guaranteed : 30 min)
Material
Pressure Insensitivity
Display type
DIMENSIONS