TECHNOLOGY INNOVATION

TSC-D200 series
Digital Mass Flow Controller

TSC-D200 series
TSC-D230 is digital and thermal MFC which developed for more general equipments lilke a load port, furnace, scrubber, and etc.
FEATURES
Fast response time and high accuracy
SPECIFICATIONS
model TSC-D230 / 245
flow range (N2 Equivalent) 30 ~ 400 slm
Flow Rate Control Range 2 ~ 100% of Full Scale
Accuracy ≤± 1.0% of Full Scale (D230), ≤± 2.0% of Full Scale (D245)
Response Time ≤± 1.5 second (10 ~ 100%)
Linearity ≤± 0.2% of Full Scale
Repeatability ≤± 0.2% of Full Scale (D230), ≤± 0.3% of Full Scale (D245)
Normal Operating Pressure
Maximum Operating Pressure
Valve Shut Down
Zero Stability
Temperature Coefficient
Leak Integrity
Control Valve type Normally Closed Solenoid
Seal type Elastomer (Viton, Viton-ETP, Kalres, PTFE, etc.)
Digital Interface Analog 0~5 VDC, Digital RS-485, D-Net
Power Supply +15~24 VDC
Operation Temperature 5 ~50 °C (Recommended temperature range : 15~35 °C)
Warm-up Time 15min (Accuracy Guaranteed : 30 min)
Material
Pressure Insensitivity
Display type
DIMENSIONS